3/28/2012	7:19:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2012	7:19:10 PM	Recipe started at 7:19 PM
3/28/2012	7:19:10 PM	Helium valve closed
3/28/2012	7:19:10 PM	H2 valve closed
3/28/2012	7:19:10 PM	BCl3 valve closed
3/28/2012	7:19:10 PM	PH3 valve closed
3/28/2012	7:19:10 PM	SiCl4 pre valve closed
3/28/2012	7:19:10 PM	SiCl4 post valve closed
3/28/2012	7:19:10 PM	Main Vac valve closed
3/28/2012	7:19:10 PM	Bypass valve closed
3/28/2012	7:19:10 PM	Bubbler valve closed
3/28/2012	7:19:10 PM	Helium MFC set to  0.000000
3/28/2012	7:19:11 PM	H2 MFC set to  0.000000
3/28/2012	7:19:11 PM	BCl3 MFC set to  0.000000
3/28/2012	7:19:11 PM	PH3 MFC set to  0.000000
3/28/2012	7:19:11 PM	SiCl4 MFC set to  0.000000
3/28/2012	7:19:11 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	7:19:11 PM	Tube furnace set to 0
3/28/2012	7:19:14 PM	H2 valve closed
3/28/2012	7:19:14 PM	BCl3 valve closed
3/28/2012	7:19:14 PM	PH3 valve closed
3/28/2012	7:19:14 PM	SiCl4 pre valve closed
3/28/2012	7:19:14 PM	SiCl4 post valve closed
3/28/2012	7:19:14 PM	Main Vac valve closed
3/28/2012	7:19:14 PM	Bypass valve closed
3/28/2012	7:19:14 PM	Bubbler valve closed
3/28/2012	7:19:14 PM	Helium valve opened
3/28/2012	7:19:14 PM	Helium MFC set to  500.000000
3/28/2012	7:19:14 PM	H2 MFC set to  0.000000
3/28/2012	7:19:14 PM	BCl3 MFC set to  0.000000
3/28/2012	7:19:14 PM	PH3 MFC set to  0.000000
3/28/2012	7:19:14 PM	SiCl4 MFC set to  0.000000
3/28/2012	7:19:14 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	7:19:14 PM	Tube furnace set to 0
3/28/2012	7:20:18 PM	Helium valve closed
3/28/2012	7:20:18 PM	H2 valve closed
3/28/2012	7:20:18 PM	BCl3 valve closed
3/28/2012	7:20:18 PM	PH3 valve closed
3/28/2012	7:20:18 PM	SiCl4 pre valve closed
3/28/2012	7:20:18 PM	SiCl4 post valve closed
3/28/2012	7:20:18 PM	Main Vac valve closed
3/28/2012	7:20:18 PM	Bypass valve closed
3/28/2012	7:20:18 PM	Bubbler valve closed
3/28/2012	7:20:18 PM	Helium MFC set to  0.000000
3/28/2012	7:20:18 PM	H2 MFC set to  0.000000
3/28/2012	7:20:18 PM	BCl3 MFC set to  0.000000
3/28/2012	7:20:18 PM	PH3 MFC set to  0.000000
3/28/2012	7:20:18 PM	SiCl4 MFC set to  0.000000
3/28/2012	7:20:18 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	7:20:19 PM	Tube furnace set to 0
3/28/2012	7:20:20 PM	Run finished at 7:20 PM
3/28/2012	7:20:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2012	7:28:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2012	7:28:31 PM	Recipe started at 7:28 PM
3/28/2012	7:28:31 PM	Helium valve closed
3/28/2012	7:28:31 PM	H2 valve closed
3/28/2012	7:28:31 PM	BCl3 valve closed
3/28/2012	7:28:31 PM	PH3 valve closed
3/28/2012	7:28:31 PM	SiCl4 pre valve closed
3/28/2012	7:28:31 PM	SiCl4 post valve closed
3/28/2012	7:28:31 PM	Main Vac valve closed
3/28/2012	7:28:31 PM	Bubbler valve closed
3/28/2012	7:28:31 PM	Bypass valve opened
3/28/2012	7:28:31 PM	Helium MFC set to  0.000000
3/28/2012	7:28:31 PM	H2 MFC set to  0.000000
3/28/2012	7:28:31 PM	BCl3 MFC set to  0.000000
3/28/2012	7:28:31 PM	PH3 MFC set to  0.000000
3/28/2012	7:28:31 PM	SiCl4 MFC set to  0.000000
3/28/2012	7:28:31 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	7:28:32 PM	Tube furnace set to 0
3/28/2012	7:29:38 PM	Helium valve closed
3/28/2012	7:29:38 PM	H2 valve closed
3/28/2012	7:29:38 PM	BCl3 valve closed
3/28/2012	7:29:38 PM	PH3 valve closed
3/28/2012	7:29:38 PM	SiCl4 pre valve closed
3/28/2012	7:29:38 PM	SiCl4 post valve closed
3/28/2012	7:29:38 PM	Main Vac valve closed
3/28/2012	7:29:38 PM	Bubbler valve closed
3/28/2012	7:29:38 PM	Bypass valve opened
3/28/2012	7:29:38 PM	Helium MFC set to  0.000000
3/28/2012	7:29:38 PM	H2 MFC set to  0.000000
3/28/2012	7:29:38 PM	BCl3 MFC set to  0.000000
3/28/2012	7:29:38 PM	PH3 MFC set to  0.000000
3/28/2012	7:29:38 PM	SiCl4 MFC set to  0.000000
3/28/2012	7:29:38 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	7:29:39 PM	Tube furnace set to 0
3/28/2012	7:30:39 PM	Helium valve closed
3/28/2012	7:30:39 PM	H2 valve closed
3/28/2012	7:30:39 PM	BCl3 valve closed
3/28/2012	7:30:39 PM	PH3 valve closed
3/28/2012	7:30:39 PM	SiCl4 pre valve closed
3/28/2012	7:30:39 PM	SiCl4 post valve closed
3/28/2012	7:30:39 PM	Bypass valve closed
3/28/2012	7:30:39 PM	Bubbler valve closed
3/28/2012	7:30:39 PM	Main Vac valve opened
3/28/2012	7:30:39 PM	Helium MFC set to  0.000000
3/28/2012	7:30:39 PM	H2 MFC set to  0.000000
3/28/2012	7:30:39 PM	BCl3 MFC set to  0.000000
3/28/2012	7:30:39 PM	PH3 MFC set to  0.000000
3/28/2012	7:30:39 PM	SiCl4 MFC set to  0.000000
3/28/2012	7:30:39 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	7:30:39 PM	Tube furnace set to 0
3/28/2012	7:30:40 PM	Run finished at 7:30 PM
3/28/2012	7:30:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2012	8:55:43 PM	Tube furnace set to 100
3/28/2012	9:05:22 PM	Recipe started at 9:05 PM
3/28/2012	9:05:22 PM	Helium valve closed
3/28/2012	9:05:22 PM	H2 valve closed
3/28/2012	9:05:22 PM	BCl3 valve closed
3/28/2012	9:05:22 PM	PH3 valve closed
3/28/2012	9:05:22 PM	SiCl4 pre valve closed
3/28/2012	9:05:22 PM	SiCl4 post valve closed
3/28/2012	9:05:22 PM	Bypass valve closed
3/28/2012	9:05:22 PM	Bubbler valve closed
3/28/2012	9:05:22 PM	Main Vac valve opened
3/28/2012	9:05:22 PM	Helium MFC set to  0.000000
3/28/2012	9:05:22 PM	H2 MFC set to  0.000000
3/28/2012	9:05:22 PM	BCl3 MFC set to  0.000000
3/28/2012	9:05:22 PM	PH3 MFC set to  0.000000
3/28/2012	9:05:22 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:05:22 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:05:22 PM	Tube furnace set to 100
3/28/2012	9:05:52 PM	H2 valve closed
3/28/2012	9:05:52 PM	BCl3 valve closed
3/28/2012	9:05:52 PM	PH3 valve closed
3/28/2012	9:05:52 PM	SiCl4 pre valve closed
3/28/2012	9:05:52 PM	SiCl4 post valve closed
3/28/2012	9:05:52 PM	Bypass valve closed
3/28/2012	9:05:52 PM	Bubbler valve closed
3/28/2012	9:05:52 PM	Helium valve opened
3/28/2012	9:05:52 PM	Main Vac valve opened
3/28/2012	9:05:52 PM	Helium MFC set to  20.000000
3/28/2012	9:05:52 PM	H2 MFC set to  0.000000
3/28/2012	9:05:52 PM	BCl3 MFC set to  0.000000
3/28/2012	9:05:52 PM	PH3 MFC set to  0.000000
3/28/2012	9:05:52 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:05:52 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:05:52 PM	Tube furnace set to 100
3/28/2012	9:06:22 PM	Helium valve closed
3/28/2012	9:06:22 PM	H2 valve closed
3/28/2012	9:06:22 PM	BCl3 valve closed
3/28/2012	9:06:22 PM	PH3 valve closed
3/28/2012	9:06:22 PM	SiCl4 pre valve closed
3/28/2012	9:06:22 PM	SiCl4 post valve closed
3/28/2012	9:06:22 PM	Bypass valve closed
3/28/2012	9:06:22 PM	Bubbler valve closed
3/28/2012	9:06:22 PM	Main Vac valve opened
3/28/2012	9:06:22 PM	Helium MFC set to  0.000000
3/28/2012	9:06:22 PM	H2 MFC set to  0.000000
3/28/2012	9:06:22 PM	BCl3 MFC set to  0.000000
3/28/2012	9:06:22 PM	PH3 MFC set to  0.000000
3/28/2012	9:06:22 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:06:22 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:06:22 PM	Tube furnace set to 100
3/28/2012	9:06:52 PM	H2 valve closed
3/28/2012	9:06:52 PM	BCl3 valve closed
3/28/2012	9:06:52 PM	PH3 valve closed
3/28/2012	9:06:52 PM	SiCl4 pre valve closed
3/28/2012	9:06:52 PM	SiCl4 post valve closed
3/28/2012	9:06:52 PM	Bypass valve closed
3/28/2012	9:06:52 PM	Bubbler valve closed
3/28/2012	9:06:52 PM	Helium valve opened
3/28/2012	9:06:52 PM	Main Vac valve opened
3/28/2012	9:06:52 PM	Helium MFC set to  20.000000
3/28/2012	9:06:52 PM	H2 MFC set to  0.000000
3/28/2012	9:06:52 PM	BCl3 MFC set to  0.000000
3/28/2012	9:06:53 PM	PH3 MFC set to  0.000000
3/28/2012	9:06:53 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:06:53 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:06:53 PM	Tube furnace set to 100
3/28/2012	9:07:23 PM	Helium valve closed
3/28/2012	9:07:23 PM	H2 valve closed
3/28/2012	9:07:23 PM	BCl3 valve closed
3/28/2012	9:07:23 PM	PH3 valve closed
3/28/2012	9:07:23 PM	SiCl4 pre valve closed
3/28/2012	9:07:23 PM	SiCl4 post valve closed
3/28/2012	9:07:23 PM	Bypass valve closed
3/28/2012	9:07:23 PM	Bubbler valve closed
3/28/2012	9:07:23 PM	Main Vac valve opened
3/28/2012	9:07:23 PM	Helium MFC set to  0.000000
3/28/2012	9:07:23 PM	H2 MFC set to  0.000000
3/28/2012	9:07:23 PM	BCl3 MFC set to  0.000000
3/28/2012	9:07:23 PM	PH3 MFC set to  0.000000
3/28/2012	9:07:23 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:07:23 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:07:23 PM	Tube furnace set to 100
3/28/2012	9:07:53 PM	H2 valve closed
3/28/2012	9:07:53 PM	BCl3 valve closed
3/28/2012	9:07:53 PM	PH3 valve closed
3/28/2012	9:07:53 PM	SiCl4 pre valve closed
3/28/2012	9:07:53 PM	SiCl4 post valve closed
3/28/2012	9:07:53 PM	Bypass valve closed
3/28/2012	9:07:53 PM	Bubbler valve closed
3/28/2012	9:07:53 PM	Helium valve opened
3/28/2012	9:07:53 PM	Main Vac valve opened
3/28/2012	9:07:53 PM	Helium MFC set to  20.000000
3/28/2012	9:07:53 PM	H2 MFC set to  0.000000
3/28/2012	9:07:53 PM	BCl3 MFC set to  0.000000
3/28/2012	9:07:53 PM	PH3 MFC set to  0.000000
3/28/2012	9:07:53 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:07:53 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:07:53 PM	Tube furnace set to 100
3/28/2012	9:08:23 PM	Helium valve closed
3/28/2012	9:08:23 PM	H2 valve closed
3/28/2012	9:08:23 PM	BCl3 valve closed
3/28/2012	9:08:23 PM	PH3 valve closed
3/28/2012	9:08:23 PM	SiCl4 pre valve closed
3/28/2012	9:08:23 PM	SiCl4 post valve closed
3/28/2012	9:08:23 PM	Bypass valve closed
3/28/2012	9:08:23 PM	Bubbler valve closed
3/28/2012	9:08:23 PM	Main Vac valve opened
3/28/2012	9:08:23 PM	Helium MFC set to  0.000000
3/28/2012	9:08:23 PM	H2 MFC set to  0.000000
3/28/2012	9:08:23 PM	BCl3 MFC set to  0.000000
3/28/2012	9:08:23 PM	PH3 MFC set to  0.000000
3/28/2012	9:08:23 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:08:23 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:08:23 PM	Tube furnace set to 100
3/28/2012	9:08:53 PM	H2 valve closed
3/28/2012	9:08:53 PM	BCl3 valve closed
3/28/2012	9:08:53 PM	PH3 valve closed
3/28/2012	9:08:53 PM	SiCl4 pre valve closed
3/28/2012	9:08:53 PM	SiCl4 post valve closed
3/28/2012	9:08:53 PM	Bypass valve closed
3/28/2012	9:08:53 PM	Bubbler valve closed
3/28/2012	9:08:53 PM	Helium valve opened
3/28/2012	9:08:53 PM	Main Vac valve opened
3/28/2012	9:08:53 PM	Helium MFC set to  20.000000
3/28/2012	9:08:53 PM	H2 MFC set to  0.000000
3/28/2012	9:08:53 PM	BCl3 MFC set to  0.000000
3/28/2012	9:08:53 PM	PH3 MFC set to  0.000000
3/28/2012	9:08:53 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:08:53 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:08:54 PM	Tube furnace set to 100
3/28/2012	9:09:24 PM	Helium valve closed
3/28/2012	9:09:24 PM	H2 valve closed
3/28/2012	9:09:24 PM	BCl3 valve closed
3/28/2012	9:09:24 PM	PH3 valve closed
3/28/2012	9:09:24 PM	SiCl4 pre valve closed
3/28/2012	9:09:24 PM	SiCl4 post valve closed
3/28/2012	9:09:24 PM	Bypass valve closed
3/28/2012	9:09:24 PM	Bubbler valve closed
3/28/2012	9:09:24 PM	Main Vac valve opened
3/28/2012	9:09:24 PM	Helium MFC set to  0.000000
3/28/2012	9:09:24 PM	H2 MFC set to  0.000000
3/28/2012	9:09:24 PM	BCl3 MFC set to  0.000000
3/28/2012	9:09:24 PM	PH3 MFC set to  0.000000
3/28/2012	9:09:24 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:09:24 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:09:24 PM	Tube furnace set to 100
3/28/2012	9:09:54 PM	H2 valve closed
3/28/2012	9:09:54 PM	BCl3 valve closed
3/28/2012	9:09:54 PM	PH3 valve closed
3/28/2012	9:09:54 PM	SiCl4 pre valve closed
3/28/2012	9:09:54 PM	SiCl4 post valve closed
3/28/2012	9:09:54 PM	Bypass valve closed
3/28/2012	9:09:54 PM	Bubbler valve closed
3/28/2012	9:09:54 PM	Helium valve opened
3/28/2012	9:09:54 PM	Main Vac valve opened
3/28/2012	9:09:54 PM	Helium MFC set to  20.000000
3/28/2012	9:09:54 PM	H2 MFC set to  0.000000
3/28/2012	9:09:54 PM	BCl3 MFC set to  0.000000
3/28/2012	9:09:54 PM	PH3 MFC set to  0.000000
3/28/2012	9:09:54 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:09:54 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:09:54 PM	Tube furnace set to 100
3/28/2012	9:10:24 PM	Helium valve closed
3/28/2012	9:10:24 PM	H2 valve closed
3/28/2012	9:10:24 PM	BCl3 valve closed
3/28/2012	9:10:24 PM	PH3 valve closed
3/28/2012	9:10:24 PM	SiCl4 pre valve closed
3/28/2012	9:10:24 PM	SiCl4 post valve closed
3/28/2012	9:10:24 PM	Bypass valve closed
3/28/2012	9:10:24 PM	Bubbler valve closed
3/28/2012	9:10:24 PM	Main Vac valve opened
3/28/2012	9:10:24 PM	Helium MFC set to  0.000000
3/28/2012	9:10:24 PM	H2 MFC set to  0.000000
3/28/2012	9:10:24 PM	BCl3 MFC set to  0.000000
3/28/2012	9:10:24 PM	PH3 MFC set to  0.000000
3/28/2012	9:10:24 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:10:24 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:10:24 PM	Tube furnace set to 100
3/28/2012	9:10:54 PM	H2 valve closed
3/28/2012	9:10:54 PM	BCl3 valve closed
3/28/2012	9:10:54 PM	PH3 valve closed
3/28/2012	9:10:54 PM	SiCl4 pre valve closed
3/28/2012	9:10:54 PM	SiCl4 post valve closed
3/28/2012	9:10:54 PM	Bypass valve closed
3/28/2012	9:10:54 PM	Bubbler valve closed
3/28/2012	9:10:54 PM	Helium valve opened
3/28/2012	9:10:54 PM	Main Vac valve opened
3/28/2012	9:10:54 PM	Helium MFC set to  20.000000
3/28/2012	9:10:54 PM	H2 MFC set to  0.000000
3/28/2012	9:10:54 PM	BCl3 MFC set to  0.000000
3/28/2012	9:10:54 PM	PH3 MFC set to  0.000000
3/28/2012	9:10:54 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:10:54 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:10:55 PM	Tube furnace set to 100
3/28/2012	9:11:25 PM	Helium valve closed
3/28/2012	9:11:25 PM	H2 valve closed
3/28/2012	9:11:25 PM	BCl3 valve closed
3/28/2012	9:11:25 PM	PH3 valve closed
3/28/2012	9:11:25 PM	SiCl4 pre valve closed
3/28/2012	9:11:25 PM	SiCl4 post valve closed
3/28/2012	9:11:25 PM	Bypass valve closed
3/28/2012	9:11:25 PM	Bubbler valve closed
3/28/2012	9:11:25 PM	Main Vac valve opened
3/28/2012	9:11:25 PM	Helium MFC set to  0.000000
3/28/2012	9:11:25 PM	H2 MFC set to  0.000000
3/28/2012	9:11:25 PM	BCl3 MFC set to  0.000000
3/28/2012	9:11:25 PM	PH3 MFC set to  0.000000
3/28/2012	9:11:25 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:11:25 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:11:25 PM	Tube furnace set to 100
3/28/2012	9:11:55 PM	H2 valve closed
3/28/2012	9:11:55 PM	BCl3 valve closed
3/28/2012	9:11:55 PM	PH3 valve closed
3/28/2012	9:11:55 PM	SiCl4 pre valve closed
3/28/2012	9:11:55 PM	SiCl4 post valve closed
3/28/2012	9:11:55 PM	Bypass valve closed
3/28/2012	9:11:55 PM	Bubbler valve closed
3/28/2012	9:11:55 PM	Helium valve opened
3/28/2012	9:11:55 PM	Main Vac valve opened
3/28/2012	9:11:55 PM	Helium MFC set to  20.000000
3/28/2012	9:11:55 PM	H2 MFC set to  0.000000
3/28/2012	9:11:55 PM	BCl3 MFC set to  0.000000
3/28/2012	9:11:55 PM	PH3 MFC set to  0.000000
3/28/2012	9:11:55 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:11:55 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:11:55 PM	Tube furnace set to 100
3/28/2012	9:12:25 PM	Helium valve closed
3/28/2012	9:12:25 PM	H2 valve closed
3/28/2012	9:12:25 PM	BCl3 valve closed
3/28/2012	9:12:25 PM	PH3 valve closed
3/28/2012	9:12:25 PM	SiCl4 pre valve closed
3/28/2012	9:12:25 PM	SiCl4 post valve closed
3/28/2012	9:12:25 PM	Bypass valve closed
3/28/2012	9:12:25 PM	Bubbler valve closed
3/28/2012	9:12:25 PM	Main Vac valve opened
3/28/2012	9:12:25 PM	Helium MFC set to  0.000000
3/28/2012	9:12:25 PM	H2 MFC set to  0.000000
3/28/2012	9:12:25 PM	BCl3 MFC set to  0.000000
3/28/2012	9:12:25 PM	PH3 MFC set to  0.000000
3/28/2012	9:12:25 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:12:25 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:12:25 PM	Tube furnace set to 100
3/28/2012	9:12:55 PM	H2 valve closed
3/28/2012	9:12:55 PM	BCl3 valve closed
3/28/2012	9:12:55 PM	PH3 valve closed
3/28/2012	9:12:55 PM	SiCl4 pre valve closed
3/28/2012	9:12:55 PM	SiCl4 post valve closed
3/28/2012	9:12:55 PM	Bypass valve closed
3/28/2012	9:12:55 PM	Bubbler valve closed
3/28/2012	9:12:55 PM	Helium valve opened
3/28/2012	9:12:55 PM	Main Vac valve opened
3/28/2012	9:12:55 PM	Helium MFC set to  20.000000
3/28/2012	9:12:55 PM	H2 MFC set to  0.000000
3/28/2012	9:12:55 PM	BCl3 MFC set to  0.000000
3/28/2012	9:12:55 PM	PH3 MFC set to  0.000000
3/28/2012	9:12:55 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:12:55 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:12:55 PM	Tube furnace set to 100
3/28/2012	9:13:26 PM	Helium valve closed
3/28/2012	9:13:26 PM	H2 valve closed
3/28/2012	9:13:26 PM	BCl3 valve closed
3/28/2012	9:13:26 PM	PH3 valve closed
3/28/2012	9:13:26 PM	SiCl4 pre valve closed
3/28/2012	9:13:26 PM	SiCl4 post valve closed
3/28/2012	9:13:26 PM	Bypass valve closed
3/28/2012	9:13:26 PM	Bubbler valve closed
3/28/2012	9:13:26 PM	Main Vac valve opened
3/28/2012	9:13:26 PM	Helium MFC set to  0.000000
3/28/2012	9:13:26 PM	H2 MFC set to  0.000000
3/28/2012	9:13:26 PM	BCl3 MFC set to  0.000000
3/28/2012	9:13:26 PM	PH3 MFC set to  0.000000
3/28/2012	9:13:26 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:13:26 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:13:26 PM	Tube furnace set to 100
3/28/2012	9:13:56 PM	H2 valve closed
3/28/2012	9:13:56 PM	BCl3 valve closed
3/28/2012	9:13:56 PM	PH3 valve closed
3/28/2012	9:13:56 PM	SiCl4 pre valve closed
3/28/2012	9:13:56 PM	SiCl4 post valve closed
3/28/2012	9:13:56 PM	Bypass valve closed
3/28/2012	9:13:56 PM	Bubbler valve closed
3/28/2012	9:13:56 PM	Helium valve opened
3/28/2012	9:13:56 PM	Main Vac valve opened
3/28/2012	9:13:56 PM	Helium MFC set to  20.000000
3/28/2012	9:13:56 PM	H2 MFC set to  0.000000
3/28/2012	9:13:56 PM	BCl3 MFC set to  0.000000
3/28/2012	9:13:56 PM	PH3 MFC set to  0.000000
3/28/2012	9:13:56 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:13:56 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:13:56 PM	Tube furnace set to 100
3/28/2012	9:14:26 PM	Helium valve closed
3/28/2012	9:14:26 PM	H2 valve closed
3/28/2012	9:14:26 PM	BCl3 valve closed
3/28/2012	9:14:26 PM	PH3 valve closed
3/28/2012	9:14:26 PM	SiCl4 pre valve closed
3/28/2012	9:14:26 PM	SiCl4 post valve closed
3/28/2012	9:14:26 PM	Bypass valve closed
3/28/2012	9:14:26 PM	Bubbler valve closed
3/28/2012	9:14:26 PM	Main Vac valve opened
3/28/2012	9:14:26 PM	Helium MFC set to  0.000000
3/28/2012	9:14:26 PM	H2 MFC set to  0.000000
3/28/2012	9:14:26 PM	BCl3 MFC set to  0.000000
3/28/2012	9:14:26 PM	PH3 MFC set to  0.000000
3/28/2012	9:14:26 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:14:26 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:14:26 PM	Tube furnace set to 100
3/28/2012	9:14:56 PM	H2 valve closed
3/28/2012	9:14:56 PM	BCl3 valve closed
3/28/2012	9:14:56 PM	PH3 valve closed
3/28/2012	9:14:56 PM	SiCl4 pre valve closed
3/28/2012	9:14:56 PM	SiCl4 post valve closed
3/28/2012	9:14:56 PM	Bypass valve closed
3/28/2012	9:14:56 PM	Bubbler valve closed
3/28/2012	9:14:56 PM	Helium valve opened
3/28/2012	9:14:56 PM	Main Vac valve opened
3/28/2012	9:14:56 PM	Helium MFC set to  20.000000
3/28/2012	9:14:56 PM	H2 MFC set to  0.000000
3/28/2012	9:14:56 PM	BCl3 MFC set to  0.000000
3/28/2012	9:14:56 PM	PH3 MFC set to  0.000000
3/28/2012	9:14:56 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:14:56 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:14:56 PM	Tube furnace set to 100
3/28/2012	9:15:26 PM	Helium valve closed
3/28/2012	9:15:26 PM	H2 valve closed
3/28/2012	9:15:26 PM	BCl3 valve closed
3/28/2012	9:15:26 PM	PH3 valve closed
3/28/2012	9:15:26 PM	SiCl4 pre valve closed
3/28/2012	9:15:26 PM	SiCl4 post valve closed
3/28/2012	9:15:26 PM	Bypass valve closed
3/28/2012	9:15:26 PM	Bubbler valve closed
3/28/2012	9:15:26 PM	Main Vac valve opened
3/28/2012	9:15:26 PM	Helium MFC set to  0.000000
3/28/2012	9:15:26 PM	H2 MFC set to  0.000000
3/28/2012	9:15:26 PM	BCl3 MFC set to  0.000000
3/28/2012	9:15:27 PM	PH3 MFC set to  0.000000
3/28/2012	9:15:27 PM	SiCl4 MFC set to  0.000000
3/28/2012	9:15:27 PM	Bypass solenoid MFC set to  0.000000
3/28/2012	9:15:27 PM	Tube furnace set to 100
3/28/2012	9:15:28 PM	Run finished at 9:15 PM
